Study of the effect of thin film thickness on the efficiency of the gas sensor prepared from TiOF₂ and the effect of gamma rays on the efficiency of the gas sensor prepared from TiO₂.

In this study, titanium oxyfluoride (TiOF₂) and titanium oxide (TiO₂) were used to manufacture gas sensors for detecting both H₂S and NO₂ gasses, where thin films were deposited on quartz and silicon substrates.

– TiOF₂ with thicknesses of (110, 6, 131, 8, 142, and 158) nm using the DC sputtering method.

– TiO₂ with a thickness of 200 nanometers using radio frequency sputtering and exposed to gamma rays at doses of (0, 2.7, 14.4, and 23) kGy.

– This is in order to study the effect of both thickness and gamma rays on the gas sensor’s efficiency at different temperatures.

The study concluded that the best structural and morphological properties of TiOF₂ membranes were at a thickness of 110.6 nanometers, where the highest sensitivity of the TiOF₂ gas sensor was recorded at a temperature of 150 ̊C for H₂S gas and at 200 ̊C for NO₂ gas. Regarding the effect of gamma rays, the results showed that at a dose of 7.2 kGy, there was an enhancement in the structural and morphological properties, thereby increasing the efficiency of the TiO₂ gas sensor, with the highest sensitivity at room temperature at a dose of 7.2 kGy for NO₂ gas.

From the above, we conclude that the thinner the TiOF₂ gas sensing film, the higher its efficiency, and the efficiency of the TiO₂ gas sensor increases when exposed to low doses of gamma rays.

The most important recommendations which the study has come up with and the average obtained:

1. Use high doses of gamma rays to demonstrate their effect on the efficiency of gas sensors.
2.  Use radiation to synthesize nanomaterials.
3. Artificial intelligence techniques can be introduced and integrated into gas sensor production, which can improve their efficiency.
4. Using nanomaterials and doping them with TiO₂ and exposing them to gamma rays to manufacture gas sensors.

the average obtained: excellent